%0 Journal Article %1 journals/tcad/ZhuZYCMYYW24 %A Zhu, Binwu %A Zheng, Su %A Yu, Ziyang %A Chen, Guojin %A Ma, Yuzhe %A Yang, Fan %A Yu, Bei %A Wong, Martin D. F. %D 2024 %J IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. %K dblp %N 3 %P 944-955 %T L2O-ILT: Learning to Optimize Inverse Lithography Techniques. %U http://dblp.uni-trier.de/db/journals/tcad/tcad43.html#ZhuZYCMYYW24 %V 43

@article{journals/tcad/ZhuZYCMYYW24, added-at = {2024-03-16T00:00:00.000+0100}, author = {Zhu, Binwu and Zheng, Su and Yu, Ziyang and Chen, Guojin and Ma, Yuzhe and Yang, Fan and Yu, Bei and Wong, Martin D. F.}, biburl = {https://www.bibsonomy.org/bibtex/2d25fcacb5c62812a356f235964657f3d/dblp}, ee = {https://doi.org/10.1109/TCAD.2023.3323164}, interhash = {4cf8650fe9062d98504562e7f310217f}, intrahash = {d25fcacb5c62812a356f235964657f3d}, journal = {IEEE Trans. Comput. Aided Des. Integr. Circuits Syst.}, keywords = {dblp}, month = {March}, number = 3, pages = {944-955}, timestamp = {2024-04-08T19:45:40.000+0200}, title = {L2O-ILT: Learning to Optimize Inverse Lithography Techniques.}, url = {http://dblp.uni-trier.de/db/journals/tcad/tcad43.html#ZhuZYCMYYW24}, volume = 43, year = 2024 }