%0 Journal Article %1 journals/tase/XiongPQWCH21 %A Xiong, WenQing %A Pan, ChunRong %A Qiao, Yan %A Wu, Naiqi %A Chen, Mingxin %A Hsieh, PinHui %D 2021 %J IEEE Trans Autom. Sci. Eng. %K dblp %N 4 %P 1653-1667 %T Reducing Wafer Delay Time by Robot Idle Time Regulation for Single-Arm Cluster Tools. %U http://dblp.uni-trier.de/db/journals/tase/tase18.html#XiongPQWCH21 %V 18

@article{journals/tase/XiongPQWCH21, added-at = {2023-01-30T00:00:00.000+0100}, author = {Xiong, WenQing and Pan, ChunRong and Qiao, Yan and Wu, Naiqi and Chen, Mingxin and Hsieh, PinHui}, biburl = {https://www.bibsonomy.org/bibtex/2afdddcea4f586ad988f842da4628eb20/dblp}, ee = {https://doi.org/10.1109/TASE.2020.3014078}, interhash = {4d1accd240df6069e36771a4333cd458}, intrahash = {afdddcea4f586ad988f842da4628eb20}, journal = {IEEE Trans Autom. Sci. Eng.}, keywords = {dblp}, number = 4, pages = {1653-1667}, timestamp = {2024-04-09T05:59:09.000+0200}, title = {Reducing Wafer Delay Time by Robot Idle Time Regulation for Single-Arm Cluster Tools.}, url = {http://dblp.uni-trier.de/db/journals/tase/tase18.html#XiongPQWCH21}, volume = 18, year = 2021 }