%0 Conference Paper %1 conf/nems/JiangZLYY11 %A Jiang, Senlin %A Zhang, Dacheng %A Lin, Longtao %A Yang, Zhenchuan %A Yan, Guizhen %B NEMS %D 2011 %I IEEE %K dblp %P 406-409 %T Fabrication and testing of a novel silicon probe for micromachined surface profilers. %U http://dblp.uni-trier.de/db/conf/nems/nems2011.html#JiangZLYY11 %@ 978-1-61284-775-7

@inproceedings{conf/nems/JiangZLYY11, added-at = {2017-05-17T00:00:00.000+0200}, author = {Jiang, Senlin and Zhang, Dacheng and Lin, Longtao and Yang, Zhenchuan and Yan, Guizhen}, biburl = {https://www.bibsonomy.org/bibtex/24bb86dc3cae4ca868459d9b233fa72a6/dblp}, booktitle = {NEMS}, crossref = {conf/nems/2011}, ee = {https://doi.org/10.1109/NEMS.2011.6017378}, interhash = {504ac05fe051d16d816f0c7caf0efd80}, intrahash = {4bb86dc3cae4ca868459d9b233fa72a6}, isbn = {978-1-61284-775-7}, keywords = {dblp}, pages = {406-409}, publisher = {IEEE}, timestamp = {2019-10-17T22:12:53.000+0200}, title = {Fabrication and testing of a novel silicon probe for micromachined surface profilers.}, url = {http://dblp.uni-trier.de/db/conf/nems/nems2011.html#JiangZLYY11}, year = 2011 }