%0 Conference Paper %1 conf/drc/RanaBRTSJPSZRKM19 %A Rana, U. %A Brunco, D. P. %A Raman, S. %A Triyoso, Dina H. %A Stoker, M. W. %A Johnson, Jeffrey B. %A Pantisano, Luigi %A Seo, K. D. %A Zhao, M. %A Reznicek, A. %A Krishnan, R. %A Moser, B. %A Freeman, J. %A Jang, L. %A Kaganer, Evgeny %B DRC %D 2019 %I IEEE %K dblp %P 251-252 %T High Performance and Yield for Super Steep Retrograde Wells (SSRW) by Well Implant / Si-based Epitaxy on Advanced Technology FinFETs. %U http://dblp.uni-trier.de/db/conf/drc/drc2019.html#RanaBRTSJPSZRKM19 %@ 978-1-7281-2112-3

@inproceedings{conf/drc/RanaBRTSJPSZRKM19, added-at = {2024-07-11T00:00:00.000+0200}, author = {Rana, U. and Brunco, D. P. and Raman, S. and Triyoso, Dina H. and Stoker, M. W. and Johnson, Jeffrey B. and Pantisano, Luigi and Seo, K. D. and Zhao, M. and Reznicek, A. and Krishnan, R. and Moser, B. and Freeman, J. and Jang, L. and Kaganer, Evgeny}, biburl = {https://www.bibsonomy.org/bibtex/20aec4adffe2f10c5ebb64790c82b870a/dblp}, booktitle = {DRC}, crossref = {conf/drc/2019}, ee = {https://doi.org/10.1109/DRC46940.2019.9046440}, interhash = {558765d2eac2cbe71badbcc90f7b4ad4}, intrahash = {0aec4adffe2f10c5ebb64790c82b870a}, isbn = {978-1-7281-2112-3}, keywords = {dblp}, pages = {251-252}, publisher = {IEEE}, timestamp = {2024-07-15T07:16:30.000+0200}, title = {High Performance and Yield for Super Steep Retrograde Wells (SSRW) by Well Implant / Si-based Epitaxy on Advanced Technology FinFETs.}, url = {http://dblp.uni-trier.de/db/conf/drc/drc2019.html#RanaBRTSJPSZRKM19}, year = 2019 }