%0 Journal Article %1 journals/mr/BorsoniBGKLRVRW01 %A Borsoni, G. %A Béchu, N. %A Gros-Jean, M. %A Korwin-Pawlowski, Michael L. %A Laffitte, R. %A Roux, V. Le %A Vallier, L. %A Rochat, Névine %A Wyon, C. %D 2001 %J Microelectron. Reliab. %K dblp %N 7 %P 1063-1066 %T Ultra-thin oxides on silicon fabricated using ultra-slow multicharged ion beams. %U http://dblp.uni-trier.de/db/journals/mr/mr41.html#BorsoniBGKLRVRW01 %V 41

@article{journals/mr/BorsoniBGKLRVRW01, added-at = {2023-03-28T00:00:00.000+0200}, author = {Borsoni, G. and Béchu, N. and Gros-Jean, M. and Korwin-Pawlowski, Michael L. and Laffitte, R. and Roux, V. Le and Vallier, L. and Rochat, Névine and Wyon, C.}, biburl = {https://www.bibsonomy.org/bibtex/2a69ff49247c7a8e6fde2945811e8ccce/dblp}, ee = {https://doi.org/10.1016/S0026-2714(01)00076-2}, interhash = {566b4038e8ac396419e58e50d8aa8f7e}, intrahash = {a69ff49247c7a8e6fde2945811e8ccce}, journal = {Microelectron. Reliab.}, keywords = {dblp}, number = 7, pages = {1063-1066}, timestamp = {2024-04-09T02:49:20.000+0200}, title = {Ultra-thin oxides on silicon fabricated using ultra-slow multicharged ion beams.}, url = {http://dblp.uni-trier.de/db/journals/mr/mr41.html#BorsoniBGKLRVRW01}, volume = 41, year = 2001 }