%0 Journal Article %1 ELS05 %A Elsholz, F. %A Schöll, E. %A Scharfenorth, C. %A Seewald, G. %A Eichler, H. J. %A Rosenfeld, A. %D 2005 %J J.~Appl.~Phys. %K imported %P 103516 %T Roughness evolution in thin film growth of SiO$_2$ and Nb$_2$O$_5$ %V 98

@article{ELS05, added-at = {2009-03-03T17:19:04.000+0100}, author = {Elsholz, F. and Sch{\"o}ll, E. and Scharfenorth, C. and Seewald, G. and Eichler, H. J. and Rosenfeld, A.}, biburl = {https://www.bibsonomy.org/bibtex/2d584add0a16b395dc657e1c70e9146a9/bronckobuster}, interhash = {5681a4732b23ffecb07b17e399c2f534}, intrahash = {d584add0a16b395dc657e1c70e9146a9}, journal = {J.~Appl.~Phys.}, keywords = {imported}, nota = {fe:}, pages = 103516, timestamp = {2009-03-03T17:19:16.000+0100}, title = {Roughness evolution in thin film growth of {S}i{O}$_2$ and {N}b$_2${O}$_5$}, volume = 98, year = 2005 }