%0 Journal Article %1 journals/micromachines/NgoMMKEL16 %A Ngo, Ha-Duong %A Mukhopadhyay, Biswajit %A Mackowiak, Piotr %A Kröhnert, Kevin %A Ehrmann, Oswin %A Lang, Klaus-Dieter %D 2016 %J Micromachines %K dblp %N 10 %P 193 %T A WSi-WSiN-Pt Metallization Scheme for Silicon Carbide-Based High Temperature Microsystems. %U http://dblp.uni-trier.de/db/journals/micromachines/micromachines7.html#NgoMMKEL16 %V 7

@article{journals/micromachines/NgoMMKEL16, added-at = {2021-10-14T00:00:00.000+0200}, author = {Ngo, Ha-Duong and Mukhopadhyay, Biswajit and Mackowiak, Piotr and Kröhnert, Kevin and Ehrmann, Oswin and Lang, Klaus-Dieter}, biburl = {https://www.bibsonomy.org/bibtex/2a6ac1f68a223ab19951b0f95cc69e4e1/dblp}, ee = {https://www.wikidata.org/entity/Q92888538}, interhash = {59fdad30d5ef03c707d96264b5b8a85d}, intrahash = {a6ac1f68a223ab19951b0f95cc69e4e1}, journal = {Micromachines}, keywords = {dblp}, number = 10, pages = 193, timestamp = {2024-04-08T19:44:18.000+0200}, title = {A WSi-WSiN-Pt Metallization Scheme for Silicon Carbide-Based High Temperature Microsystems.}, url = {http://dblp.uni-trier.de/db/journals/micromachines/micromachines7.html#NgoMMKEL16}, volume = 7, year = 2016 }