%0 Journal Article %1 journals/mr/AckaertWBCC01 %A Ackaert, Jan %A Wang, Zhichun %A Backer, Eddy De %A Colson, P. %A Coppens, Peter %D 2001 %J Microelectron. Reliab. %K dblp %N 9-10 %P 1403-1407 %T Non Contact Surface Potential Measurements for Charging Reduction During Manufacturing of Metal-Insulator-Metal Capacitors. %U http://dblp.uni-trier.de/db/journals/mr/mr41.html#AckaertWBCC01 %V 41

@article{journals/mr/AckaertWBCC01, added-at = {2020-02-22T00:00:00.000+0100}, author = {Ackaert, Jan and Wang, Zhichun and Backer, Eddy De and Colson, P. and Coppens, Peter}, biburl = {https://www.bibsonomy.org/bibtex/29d9a46258776704a2af6498533ae6c7c/dblp}, ee = {https://doi.org/10.1016/S0026-2714(01)00158-5}, interhash = {5ff26b039ed66fcc560aafcdbc7b8c4d}, intrahash = {9d9a46258776704a2af6498533ae6c7c}, journal = {Microelectron. Reliab.}, keywords = {dblp}, number = {9-10}, pages = {1403-1407}, timestamp = {2020-02-25T13:23:40.000+0100}, title = {Non Contact Surface Potential Measurements for Charging Reduction During Manufacturing of Metal-Insulator-Metal Capacitors.}, url = {http://dblp.uni-trier.de/db/journals/mr/mr41.html#AckaertWBCC01}, volume = 41, year = 2001 }