Article,

Thermoelastic Damping in Micro- and Nanomechanical Systems

, and .
Phys. Rev. B, 61 (8): 5600--5609 (Feb 17, 2000)
DOI: 10.1103/physrevb.61.5600

Abstract

The importance of thermoelastic damping as a fundamental dissipation mechanism for small-scale mechanical resonators is evaluated in light of recent efforts to design high-\$Q\$ micrometer- and nanometer-scale electromechanical systems. The equations of linear thermoelasticity are used to give a simple derivation for thermoelastic damping of small flexural vibrations in thin beams. It is shown that Zener's well-known approximation by a Lorentzian with a single thermal relaxation time slightly deviates from the exact expression.

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