%0 Journal Article %1 journals/eswa/KangLCKPPD09 %A Kang, Pilsung %A Lee, Hyoungjoo %A Cho, Sungzoon %A Kim, Dongil %A Park, Jinwoo %A Park, Chan-Kyoo %A Doh, Seungyong %D 2009 %J Expert Syst. Appl. %K dblp %N 10 %P 12554-12561 %T A virtual metrology system for semiconductor manufacturing. %U http://dblp.uni-trier.de/db/journals/eswa/eswa36.html#KangLCKPPD09 %V 36

@article{journals/eswa/KangLCKPPD09, added-at = {2023-03-21T00:00:00.000+0100}, author = {Kang, Pilsung and Lee, Hyoungjoo and Cho, Sungzoon and Kim, Dongil and Park, Jinwoo and Park, Chan-Kyoo and Doh, Seungyong}, biburl = {https://www.bibsonomy.org/bibtex/2ea7d1f30a2c988fc962910f578cbead9/dblp}, ee = {https://doi.org/10.1016/j.eswa.2009.05.053}, interhash = {7222a078222c8d591d0d124e3651f267}, intrahash = {ea7d1f30a2c988fc962910f578cbead9}, journal = {Expert Syst. Appl.}, keywords = {dblp}, number = 10, pages = {12554-12561}, timestamp = {2024-04-08T10:06:10.000+0200}, title = {A virtual metrology system for semiconductor manufacturing.}, url = {http://dblp.uni-trier.de/db/journals/eswa/eswa36.html#KangLCKPPD09}, volume = 36, year = 2009 }