%0 Conference Paper %1 conf/nems/BurouniBET11 %A Burouni, Narges %A Berenschot, Erwin %A Elwenspoek, Miko %A Tas, Niels R. %B NEMS %D 2011 %I IEEE %K dblp %P 940-943 %T Dimensional control in corner lithography for wafer-scale fabrication of nano-apertures. %U http://dblp.uni-trier.de/db/conf/nems/nems2011.html#BurouniBET11 %@ 978-1-61284-775-7

@inproceedings{conf/nems/BurouniBET11, added-at = {2021-08-11T00:00:00.000+0200}, author = {Burouni, Narges and Berenschot, Erwin and Elwenspoek, Miko and Tas, Niels R.}, biburl = {https://www.bibsonomy.org/bibtex/204e6076f2f7370fd083ed3f76a046842/dblp}, booktitle = {NEMS}, crossref = {conf/nems/2011}, ee = {https://doi.org/10.1109/NEMS.2011.6017509}, interhash = {761d06169bc266a5a0c8719e81ac9e13}, intrahash = {04e6076f2f7370fd083ed3f76a046842}, isbn = {978-1-61284-775-7}, keywords = {dblp}, pages = {940-943}, publisher = {IEEE}, timestamp = {2024-04-10T19:55:27.000+0200}, title = {Dimensional control in corner lithography for wafer-scale fabrication of nano-apertures.}, url = {http://dblp.uni-trier.de/db/conf/nems/nems2011.html#BurouniBET11}, year = 2011 }