%0 Conference Paper %1 conf/irps/JeongLJKKY0CKJJ20 %A Jeong, Tae-Young %A Lee, Miji %A Jo, Yunkyung %A Kim, Jinwoo %A Kim, Min %A Yeo, Myungsoo %A Kim, Jinseok %A Choi, Hyunjun %A Kim, Joosung %A Jo, Yoojin %A Ji, Yongsung %A Uemura, Taiki %A Jiang, Hai %A Kwon, Dongkyun %A Rhee, HwaSung %A Pae, Sangwoo %A Lee, Brandon %B IRPS %D 2020 %I IEEE %K dblp %P 1-4 %T Reliability on EUV Interconnect Technology for 7nm and beyond. %U http://dblp.uni-trier.de/db/conf/irps/irps2020.html#JeongLJKKY0CKJJ20 %@ 978-1-7281-3199-3

@inproceedings{conf/irps/JeongLJKKY0CKJJ20, added-at = {2020-11-24T00:00:00.000+0100}, author = {Jeong, Tae-Young and Lee, Miji and Jo, Yunkyung and Kim, Jinwoo and Kim, Min and Yeo, Myungsoo and Kim, Jinseok and Choi, Hyunjun and Kim, Joosung and Jo, Yoojin and Ji, Yongsung and Uemura, Taiki and Jiang, Hai and Kwon, Dongkyun and Rhee, HwaSung and Pae, Sangwoo and Lee, Brandon}, biburl = {https://www.bibsonomy.org/bibtex/285651ba0f402b944510fe5fe9ff2e18f/dblp}, booktitle = {IRPS}, crossref = {conf/irps/2020}, ee = {https://doi.org/10.1109/IRPS45951.2020.9129318}, interhash = {791434b6ef732a0d737247de1385716d}, intrahash = {85651ba0f402b944510fe5fe9ff2e18f}, isbn = {978-1-7281-3199-3}, keywords = {dblp}, pages = {1-4}, publisher = {IEEE}, timestamp = {2020-11-25T11:39:48.000+0100}, title = {Reliability on EUV Interconnect Technology for 7nm and beyond.}, url = {http://dblp.uni-trier.de/db/conf/irps/irps2020.html#JeongLJKKY0CKJJ20}, year = 2020 }