%0 Conference Paper %1 conf/essderc/FlorentLPPPRGH17 %A Florent, Karine %A Lavizzari, Simone %A Piazza, Luca Di %A Popovici, Mihaela Ioana %A Potoms, Goedele %A Raymaekers, Tom %A Groeseneken, Guido %A Houdt, Jan Van %B ESSDERC %D 2017 %I IEEE %K dblp %P 164-167 %T From planar to vertical capacitors: A step towards ferroelectric V-FeFET integration. %U http://dblp.uni-trier.de/db/conf/essderc/essderc2017.html#FlorentLPPPRGH17 %@ 978-1-5090-5978-2

@inproceedings{conf/essderc/FlorentLPPPRGH17, added-at = {2024-06-09T00:00:00.000+0200}, author = {Florent, Karine and Lavizzari, Simone and Piazza, Luca Di and Popovici, Mihaela Ioana and Potoms, Goedele and Raymaekers, Tom and Groeseneken, Guido and Houdt, Jan Van}, biburl = {https://www.bibsonomy.org/bibtex/2e2c4879db277e9570c1ffb56bcf4f25b/dblp}, booktitle = {ESSDERC}, crossref = {conf/essderc/2017}, ee = {https://doi.org/10.1109/ESSDERC.2017.8066617}, interhash = {81927dad525f4152b7d7e0d2b4557d13}, intrahash = {e2c4879db277e9570c1ffb56bcf4f25b}, isbn = {978-1-5090-5978-2}, keywords = {dblp}, pages = {164-167}, publisher = {IEEE}, timestamp = {2024-06-17T07:46:25.000+0200}, title = {From planar to vertical capacitors: A step towards ferroelectric V-FeFET integration.}, url = {http://dblp.uni-trier.de/db/conf/essderc/essderc2017.html#FlorentLPPPRGH17}, year = 2017 }