%0 Conference Paper %1 conf/icinco/BacelliRI07 %A Bacelli, Giorgio %A Ringwood, John V. %A Iordanov, Petar %B ICINCO-SPSMC %D 2007 %E Zaytoon, Janan %E Ferrier, Jean-Louis %E Andrade-Cetto, Juan %E Filipe, Joaquim %I INSTICC Press %K dblp %P 202-207 %T Impedance matching controller for an inductively coupled plasma chamber - L-type matching network automatic controller. %U http://dblp.uni-trier.de/db/conf/icinco/icinco2007-spsmc.html#BacelliRI07 %@ 978-972-8865-84-9

@inproceedings{conf/icinco/BacelliRI07, added-at = {2007-07-11T00:00:00.000+0200}, author = {Bacelli, Giorgio and Ringwood, John V. and Iordanov, Petar}, biburl = {https://www.bibsonomy.org/bibtex/21ad3ef7331f32d6b25d74b4e71146e02/dblp}, booktitle = {ICINCO-SPSMC}, crossref = {conf/icinco/2007spsmc}, date = {2007-07-11}, description = {dblp}, editor = {Zaytoon, Janan and Ferrier, Jean-Louis and Andrade-Cetto, Juan and Filipe, Joaquim}, interhash = {85d84cd4e91db1370c584205ce174182}, intrahash = {1ad3ef7331f32d6b25d74b4e71146e02}, isbn = {978-972-8865-84-9}, keywords = {dblp}, pages = {202-207}, publisher = {INSTICC Press}, timestamp = {2007-07-16T13:38:57.000+0200}, title = {Impedance matching controller for an inductively coupled plasma chamber - L-type matching network automatic controller.}, url = {http://dblp.uni-trier.de/db/conf/icinco/icinco2007-spsmc.html#BacelliRI07}, year = 2007 }