%0 Thesis %1 aktaa2009development %A Aktaa, Jarir %A Bade, Klaus %A Haj-Taieb, Manel %D 2009 %K %T Development of high temperature electrodeposited LIGA MEMS materials

@phdthesis{aktaa2009development, added-at = {2023-12-13T03:21:38.000+0100}, author = {Aktaa, Jarir and Bade, Klaus and Haj-Taieb, Manel}, biburl = {https://www.bibsonomy.org/bibtex/219a1862ad3f022f546ee1a306c7a0b52/admin}, dnbtitleid = {1004810369}, interhash = {8a982c4be4277bb51573856329249e41}, intrahash = {19a1862ad3f022f546ee1a306c7a0b52}, keywords = {}, school = {Uni Karlsruhe}, timestamp = {2023-12-13T03:21:38.000+0100}, title = {Development of high temperature electrodeposited LIGA MEMS materials}, year = 2009 }