%0 Journal Article %1 journals/mr/PinzelliGBVBG07 %A Pinzelli, L. %A Gros-Jean, M. %A Bréchet, Y. %A Volpi, F. %A Bajolet, A. %A Giraudin, J.-C. %D 2007 %J Microelectron. Reliab. %K dblp %N 4-5 %P 700-703 %T High-K dielectric deposition in 3D architectures: The case of Ta2O5 deposited with metal-organic precursor TBTDET. %U http://dblp.uni-trier.de/db/journals/mr/mr47.html#PinzelliGBVBG07 %V 47

@article{journals/mr/PinzelliGBVBG07, added-at = {2020-02-22T00:00:00.000+0100}, author = {Pinzelli, L. and Gros-Jean, M. and Bréchet, Y. and Volpi, F. and Bajolet, A. and Giraudin, J.-C.}, biburl = {https://www.bibsonomy.org/bibtex/2b13fdd832df248baf97a87d7ea7373b4/dblp}, ee = {https://doi.org/10.1016/j.microrel.2007.01.066}, interhash = {913d55403dcc118b144d2ac1860dd3ab}, intrahash = {b13fdd832df248baf97a87d7ea7373b4}, journal = {Microelectron. Reliab.}, keywords = {dblp}, number = {4-5}, pages = {700-703}, timestamp = {2020-02-25T13:22:34.000+0100}, title = {High-K dielectric deposition in 3D architectures: The case of Ta2O5 deposited with metal-organic precursor TBTDET.}, url = {http://dblp.uni-trier.de/db/journals/mr/mr47.html#PinzelliGBVBG07}, volume = 47, year = 2007 }