%0 Conference Paper %1 conf/nems/ChengYLZZWS13 %A Cheng, Wei %A Yin, Yugang %A Li, Yipan %A Zhang, Haoer %A Zhang, Shiming %A Wang, Lingyun %A Sun, Daoheng %B NEMS %D 2013 %I IEEE %K dblp %P 841-844 %T Discussion on the lapping and polishing process of 4H-SiC wafer. %U http://dblp.uni-trier.de/db/conf/nems/nems2013.html#ChengYLZZWS13

@inproceedings{conf/nems/ChengYLZZWS13, added-at = {2017-05-17T00:00:00.000+0200}, author = {Cheng, Wei and Yin, Yugang and Li, Yipan and Zhang, Haoer and Zhang, Shiming and Wang, Lingyun and Sun, Daoheng}, biburl = {https://www.bibsonomy.org/bibtex/23ea3d13fc0c0689c8e4f55cb81d29918/dblp}, booktitle = {NEMS}, crossref = {conf/nems/2013}, ee = {https://doi.org/10.1109/NEMS.2013.6559856}, interhash = {9a59f387e82b9a5f73c5358f54c3e52c}, intrahash = {3ea3d13fc0c0689c8e4f55cb81d29918}, keywords = {dblp}, pages = {841-844}, publisher = {IEEE}, timestamp = {2019-10-17T22:13:37.000+0200}, title = {Discussion on the lapping and polishing process of 4H-SiC wafer.}, url = {http://dblp.uni-trier.de/db/conf/nems/nems2013.html#ChengYLZZWS13}, year = 2013 }