%0 Conference Paper %1 conf/robio/DuCWCY12 %A Du, Chong %A Chen, Weihai %A Wu, Yunjie %A Chen, Wenjie %A Yuan, Mei %B ROBIO %D 2012 %I IEEE %K dblp %P 999-1004 %T Design of an aerostatic imprint head with off-plane alignment functionality for nanoimprint lithography. %U http://dblp.uni-trier.de/db/conf/robio/robio2012.html#DuCWCY12 %@ 978-1-4673-2125-9

@inproceedings{conf/robio/DuCWCY12, added-at = {2017-05-24T00:00:00.000+0200}, author = {Du, Chong and Chen, Weihai and Wu, Yunjie and Chen, Wenjie and Yuan, Mei}, biburl = {https://www.bibsonomy.org/bibtex/21bbc18529edcc5acd510edda7c09736b/dblp}, booktitle = {ROBIO}, crossref = {conf/robio/2012}, ee = {https://doi.org/10.1109/ROBIO.2012.6491099}, interhash = {9b6dec29f863774f02d429991f59401e}, intrahash = {1bbc18529edcc5acd510edda7c09736b}, isbn = {978-1-4673-2125-9}, keywords = {dblp}, pages = {999-1004}, publisher = {IEEE}, timestamp = {2019-10-17T22:07:25.000+0200}, title = {Design of an aerostatic imprint head with off-plane alignment functionality for nanoimprint lithography.}, url = {http://dblp.uni-trier.de/db/conf/robio/robio2012.html#DuCWCY12}, year = 2012 }