%0 Conference Paper %1 conf/icit2/ZhuCC20 %A Zhu, Li %A Chen, Junghui %A Chen, Chun-I %B ICIT %D 2020 %I IEEE %K dblp %P 316-321 %T Prognostics of tool failing behavior based on autoassociative Gaussian process regression for semiconductor manufacturing. %U http://dblp.uni-trier.de/db/conf/icit2/icit2020.html#ZhuCC20 %@ 978-1-7281-5754-2

@inproceedings{conf/icit2/ZhuCC20, added-at = {2020-05-04T00:00:00.000+0200}, author = {Zhu, Li and Chen, Junghui and Chen, Chun-I}, biburl = {https://www.bibsonomy.org/bibtex/250eb2a1ca5e0a1aa82ea7cbc315bda39/dblp}, booktitle = {ICIT}, crossref = {conf/icit2/2020}, ee = {https://doi.org/10.1109/ICIT45562.2020.9067286}, interhash = {9ec8242f411bc4db29bcdf0f64ed5b4c}, intrahash = {50eb2a1ca5e0a1aa82ea7cbc315bda39}, isbn = {978-1-7281-5754-2}, keywords = {dblp}, pages = {316-321}, publisher = {IEEE}, timestamp = {2020-05-05T11:46:01.000+0200}, title = {Prognostics of tool failing behavior based on autoassociative Gaussian process regression for semiconductor manufacturing.}, url = {http://dblp.uni-trier.de/db/conf/icit2/icit2020.html#ZhuCC20}, year = 2020 }