%0 Conference Paper %1 conf/icta3/ZhouQKW20 %A Zhou, Shicheng %A Qi, Xiaoyun %A Kang, Qiushi %A Wang, Chenxi %B ICTA %D 2020 %I IEEE %K dblp %P 130-132 %T Low-temperature direct and indirect bonding using plasma activation for 3D integration. %U http://dblp.uni-trier.de/db/conf/icta3/icta2020.html#ZhouQKW20 %@ 978-1-7281-8032-8

@inproceedings{conf/icta3/ZhouQKW20, added-at = {2023-11-10T00:00:00.000+0100}, author = {Zhou, Shicheng and Qi, Xiaoyun and Kang, Qiushi and Wang, Chenxi}, biburl = {https://www.bibsonomy.org/bibtex/209179b1b24cc9f0f95ae26a2e8aa92a0/dblp}, booktitle = {ICTA}, crossref = {conf/icta3/2020}, ee = {https://doi.org/10.1109/ICTA50426.2020.9331985}, interhash = {9f7a5d4332778ac1ae433f599c18bead}, intrahash = {09179b1b24cc9f0f95ae26a2e8aa92a0}, isbn = {978-1-7281-8032-8}, keywords = {dblp}, pages = {130-132}, publisher = {IEEE}, timestamp = {2024-04-09T17:04:03.000+0200}, title = {Low-temperature direct and indirect bonding using plasma activation for 3D integration.}, url = {http://dblp.uni-trier.de/db/conf/icta3/icta2020.html#ZhouQKW20}, year = 2020 }