Article,

NOVEL METHODS FOR DEPOSITION OF BORON CARBIDE FILMS

, , , , , and .
Mat. Res. Soc. Symp. Proc., (1991)

Abstract

By combining pentaborane (B5H9) and decarborane (B10H14) with methane in a plasma reactor, a variety of boron-carbides can be made over a wide range of compositions. The resulting thin films have uniform composition and appear to be polycrystallin

Tags

Users

  • @ghuot

Comments and Reviews