%0 Conference Paper %1 conf/iconac/RenZLZ19 %A Ren, Dongxu %A Zhao, Zexiang %A Li, Bin %A Zeng, Wenhan %B ICAC %D 2019 %E Yu, Hui %I IEEE %K dblp %P 1-5 %T Influence of Exposure Energy Control for High Voltage Pulsed Xenon Lamp on the Lithography Accuracy of Linear Grating. %U http://dblp.uni-trier.de/db/conf/iconac/iconac2019.html#RenZLZ19 %@ 978-1-8613-7665-7

@inproceedings{conf/iconac/RenZLZ19, added-at = {2019-11-18T00:00:00.000+0100}, author = {Ren, Dongxu and Zhao, Zexiang and Li, Bin and Zeng, Wenhan}, biburl = {https://www.bibsonomy.org/bibtex/2f7d91ead00d4d3eb2c634b9ab2e23adb/dblp}, booktitle = {ICAC}, crossref = {conf/iconac/2019}, editor = {Yu, Hui}, ee = {https://doi.org/10.23919/IConAC.2019.8895223}, interhash = {a6627180befeb16c45fd74f8c5200277}, intrahash = {f7d91ead00d4d3eb2c634b9ab2e23adb}, isbn = {978-1-8613-7665-7}, keywords = {dblp}, pages = {1-5}, publisher = {IEEE}, timestamp = {2019-11-19T11:41:06.000+0100}, title = {Influence of Exposure Energy Control for High Voltage Pulsed Xenon Lamp on the Lithography Accuracy of Linear Grating.}, url = {http://dblp.uni-trier.de/db/conf/iconac/iconac2019.html#RenZLZ19}, year = 2019 }