Please log in to take part in the discussion (add own reviews or comments).
Cite this publication
More citation styles
- please select -
%0 Conference Paper
%1 conf/iconac/RenZLZ19
%A Ren, Dongxu
%A Zhao, Zexiang
%A Li, Bin
%A Zeng, Wenhan
%B ICAC
%D 2019
%E Yu, Hui
%I IEEE
%K dblp
%P 1-5
%T Influence of Exposure Energy Control for High Voltage Pulsed Xenon Lamp on the Lithography Accuracy of Linear Grating.
%U http://dblp.uni-trier.de/db/conf/iconac/iconac2019.html#RenZLZ19
%@ 978-1-8613-7665-7
@inproceedings{conf/iconac/RenZLZ19,
added-at = {2019-11-18T00:00:00.000+0100},
author = {Ren, Dongxu and Zhao, Zexiang and Li, Bin and Zeng, Wenhan},
biburl = {https://www.bibsonomy.org/bibtex/2f7d91ead00d4d3eb2c634b9ab2e23adb/dblp},
booktitle = {ICAC},
crossref = {conf/iconac/2019},
editor = {Yu, Hui},
ee = {https://doi.org/10.23919/IConAC.2019.8895223},
interhash = {a6627180befeb16c45fd74f8c5200277},
intrahash = {f7d91ead00d4d3eb2c634b9ab2e23adb},
isbn = {978-1-8613-7665-7},
keywords = {dblp},
pages = {1-5},
publisher = {IEEE},
timestamp = {2019-11-19T11:41:06.000+0100},
title = {Influence of Exposure Energy Control for High Voltage Pulsed Xenon Lamp on the Lithography Accuracy of Linear Grating.},
url = {http://dblp.uni-trier.de/db/conf/iconac/iconac2019.html#RenZLZ19},
year = 2019
}