Inproceedings,
Composition of Metal Layers in CMOS-MEMS Micromachining Process.
B. Granados-Rojas, M. Reyes-Barranca, L. Flores-Nava, G. Abarca-Jimenez, M. Aleman-Arce, and Y. González-Navarro.CCE, page 1-4. IEEE, (2019)
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- conf/iceee/Granados-RojasR19
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- inproceedings
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- CCE
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- 2019
- pages
- 1-4
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- IEEE
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- conf/iceee/2019
- ee
- https://doi.org/10.1109/ICEEE.2019.8884506
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- 978-1-7281-4840-3
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- http://dblp.uni-trier.de/db/conf/iceee/iceee2019.html#Granados-RojasR19
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%1 conf/iceee/Granados-RojasR19
%A Granados-Rojas, Benito
%A Reyes-Barranca, Mario Alfredo
%A Flores-Nava, Luis Martín
%A Abarca-Jimenez, Griselda Stephany
%A Aleman-Arce, Miguel Ángel
%A González-Navarro, Yesenia Eleonor
%B CCE
%D 2019
%I IEEE
%K dblp
%P 1-4
%T Composition of Metal Layers in CMOS-MEMS Micromachining Process.
%U http://dblp.uni-trier.de/db/conf/iceee/iceee2019.html#Granados-RojasR19
%@ 978-1-7281-4840-3
@inproceedings{conf/iceee/Granados-RojasR19,
added-at = {2019-11-05T00:00:00.000+0100},
author = {Granados-Rojas, Benito and Reyes-Barranca, Mario Alfredo and Flores-Nava, Luis Martín and Abarca-Jimenez, Griselda Stephany and Aleman-Arce, Miguel Ángel and González-Navarro, Yesenia Eleonor},
biburl = {https://www.bibsonomy.org/bibtex/2cb1e61f83748334d0bfd5f2865bbc875/dblp},
booktitle = {CCE},
crossref = {conf/iceee/2019},
ee = {https://doi.org/10.1109/ICEEE.2019.8884506},
interhash = {adfa6f20b97b21ee1379f2ffd1b59a67},
intrahash = {cb1e61f83748334d0bfd5f2865bbc875},
isbn = {978-1-7281-4840-3},
keywords = {dblp},
pages = {1-4},
publisher = {IEEE},
timestamp = {2019-11-06T11:40:23.000+0100},
title = {Composition of Metal Layers in CMOS-MEMS Micromachining Process.},
url = {http://dblp.uni-trier.de/db/conf/iceee/iceee2019.html#Granados-RojasR19},
year = 2019
}