%0 Conference Paper %1 conf/nems/HongYLSZ021 %A Hong, Hao %A Ye, Li %A Li, Ke %A Sarro, Pasqualina M. %A Zhang, Guoqi %A Liu, Zewen %B NEMS %D 2021 %I IEEE %K dblp %P 174-177 %T Fabrication of Nanoslits with Etching TSWE Method. %U http://dblp.uni-trier.de/db/conf/nems/nems2021.html#HongYLSZ021 %@ 978-1-6654-1941-3

@inproceedings{conf/nems/HongYLSZ021, added-at = {2022-10-02T00:00:00.000+0200}, author = {Hong, Hao and Ye, Li and Li, Ke and Sarro, Pasqualina M. and Zhang, Guoqi and Liu, Zewen}, biburl = {https://www.bibsonomy.org/bibtex/2c56dc5067e09d65fcde53e13ea4a3879/dblp}, booktitle = {NEMS}, crossref = {conf/nems/2021}, ee = {https://doi.org/10.1109/NEMS51815.2021.9451489}, interhash = {b2a7573d77b3abd08411ef62eda52f10}, intrahash = {c56dc5067e09d65fcde53e13ea4a3879}, isbn = {978-1-6654-1941-3}, keywords = {dblp}, pages = {174-177}, publisher = {IEEE}, timestamp = {2024-04-09T19:16:24.000+0200}, title = {Fabrication of Nanoslits with Etching TSWE Method.}, url = {http://dblp.uni-trier.de/db/conf/nems/nems2021.html#HongYLSZ021}, year = 2021 }