%0 Journal Article %1 journals/kybernetes/LiuLLCLL10 %A Liu, Van-Tsai %A Liu, Chien-Hung %A Li, Hau-Wei %A Chen, Chieh-Li %A Lin, Chun-Liang %A Lin, Yu-Chen %D 2010 %J Kybernetes %K dblp %N 6 %P 1029-1039 %T Measurement and tracking control of the Z-tilts error compensating stage of the nano-measuring machine. %U http://dblp.uni-trier.de/db/journals/kybernetes/kybernetes39.html#LiuLLCLL10 %V 39

@article{journals/kybernetes/LiuLLCLL10, added-at = {2022-01-03T00:00:00.000+0100}, author = {Liu, Van-Tsai and Liu, Chien-Hung and Li, Hau-Wei and Chen, Chieh-Li and Lin, Chun-Liang and Lin, Yu-Chen}, biburl = {https://www.bibsonomy.org/bibtex/2e885f145b83452660e5de4023c91c6e5/dblp}, ee = {https://doi.org/10.1108/03684921011046807}, interhash = {b3e3dd558f2eefafcf1fd82c852a8c0b}, intrahash = {e885f145b83452660e5de4023c91c6e5}, journal = {Kybernetes}, keywords = {dblp}, number = 6, pages = {1029-1039}, timestamp = {2024-04-08T12:54:04.000+0200}, title = {Measurement and tracking control of the Z-tilts error compensating stage of the nano-measuring machine.}, url = {http://dblp.uni-trier.de/db/journals/kybernetes/kybernetes39.html#LiuLLCLL10}, volume = 39, year = 2010 }