%0 Conference Paper %1 conf/ispd/YuanP11 %A Yuan, Kun %A Pan, David Z. %B ISPD %D 2011 %E Chang, Yao-Wen %E Hu, Jiang %I ACM %K dblp %P 151-158 %T E-beam lithography stencil planning and optimization with overlapped characters. %U http://dblp.uni-trier.de/db/conf/ispd/ispd2011.html#YuanP11 %@ 978-1-4503-0550-1

@inproceedings{conf/ispd/YuanP11, added-at = {2018-11-06T00:00:00.000+0100}, author = {Yuan, Kun and Pan, David Z.}, biburl = {https://www.bibsonomy.org/bibtex/22f0336dd45e77f330c19f0e87f1928f4/dblp}, booktitle = {ISPD}, crossref = {conf/ispd/2011}, editor = {Chang, Yao-Wen and Hu, Jiang}, ee = {https://doi.org/10.1145/1960397.1960433}, interhash = {b990e777d8bfb758055bd58ff33b7c93}, intrahash = {2f0336dd45e77f330c19f0e87f1928f4}, isbn = {978-1-4503-0550-1}, keywords = {dblp}, pages = {151-158}, publisher = {ACM}, timestamp = {2018-11-07T14:00:01.000+0100}, title = {E-beam lithography stencil planning and optimization with overlapped characters.}, url = {http://dblp.uni-trier.de/db/conf/ispd/ispd2011.html#YuanP11}, year = 2011 }