%0 Conference Paper %1 conf/isnn/RyuLPPH06 %A Ryu, Kyung-Han %A Lee, Song-Jae %A Park, Jaehyun %A Park, Dong-Chul %A Hong, Sang %B ISNN (2) %D 2006 %E Wang, Jun %E Yi, Zhang %E Zurada, Jacek M. %E Lu, Bao-Liang %E Yin, Hujun %I Springer %K dblp %P 376-381 %T Fault Detection of Reactive Ion Etching Using Time Series Neural Networks. %U http://dblp.uni-trier.de/db/conf/isnn/isnn2006-3.html#RyuLPPH06 %V 3973 %@ 3-540-34482-9

@inproceedings{conf/isnn/RyuLPPH06, added-at = {2023-03-12T00:00:00.000+0100}, author = {Ryu, Kyung-Han and Lee, Song-Jae and Park, Jaehyun and Park, Dong-Chul and Hong, Sang}, biburl = {https://www.bibsonomy.org/bibtex/2ab04c3c0edaaa6713adb54dd1b8d36b0/dblp}, booktitle = {ISNN (2)}, crossref = {conf/isnn/2006-3}, editor = {Wang, Jun and Yi, Zhang and Zurada, Jacek M. and Lu, Bao-Liang and Yin, Hujun}, ee = {https://doi.org/10.1007/11760191_56}, interhash = {c339101d1bdc1c3a1b649530333694af}, intrahash = {ab04c3c0edaaa6713adb54dd1b8d36b0}, isbn = {3-540-34482-9}, keywords = {dblp}, pages = {376-381}, publisher = {Springer}, series = {Lecture Notes in Computer Science}, timestamp = {2024-08-26T07:42:46.000+0200}, title = {Fault Detection of Reactive Ion Etching Using Time Series Neural Networks.}, url = {http://dblp.uni-trier.de/db/conf/isnn/isnn2006-3.html#RyuLPPH06}, volume = 3973, year = 2006 }