Inproceedings,
Reliability of Mo as Word Line Metal in 3D NAND.
D. Tierno, K. Croes, A. Ajaykumar, S. Ramesh, G. den Bosch, and M. Rosmeulen.IRPS, page 1-6. IEEE, (2021)
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- BibTeX key
- conf/irps/TiernoCARBR21
- entry type
- inproceedings
- booktitle
- IRPS
- year
- 2021
- pages
- 1-6
- publisher
- IEEE
- crossref
- conf/irps/2021
- ee
- https://doi.org/10.1109/IRPS46558.2021.9405132
- isbn
- 978-1-7281-6893-7
- url
- http://dblp.uni-trier.de/db/conf/irps/irps2021.html#TiernoCARBR21
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- please select -%0 Conference Paper
%1 conf/irps/TiernoCARBR21
%A Tierno, Davide
%A Croes, Kristof
%A Ajaykumar, Arjun
%A Ramesh, Siva
%A den Bosch, Geert Van
%A Rosmeulen, Maarten
%B IRPS
%D 2021
%I IEEE
%K dblp
%P 1-6
%T Reliability of Mo as Word Line Metal in 3D NAND.
%U http://dblp.uni-trier.de/db/conf/irps/irps2021.html#TiernoCARBR21
%@ 978-1-7281-6893-7
@inproceedings{conf/irps/TiernoCARBR21,
added-at = {2021-10-14T00:00:00.000+0200},
author = {Tierno, Davide and Croes, Kristof and Ajaykumar, Arjun and Ramesh, Siva and den Bosch, Geert Van and Rosmeulen, Maarten},
biburl = {https://www.bibsonomy.org/bibtex/25c1dc665c65729c0c69470643244307c/dblp},
booktitle = {IRPS},
crossref = {conf/irps/2021},
ee = {https://doi.org/10.1109/IRPS46558.2021.9405132},
interhash = {c56a357ef10bc960f229e190c96948cf},
intrahash = {5c1dc665c65729c0c69470643244307c},
isbn = {978-1-7281-6893-7},
keywords = {dblp},
pages = {1-6},
publisher = {IEEE},
timestamp = {2024-04-09T12:18:55.000+0200},
title = {Reliability of Mo as Word Line Metal in 3D NAND.},
url = {http://dblp.uni-trier.de/db/conf/irps/irps2021.html#TiernoCARBR21},
year = 2021
}