%0 Conference Paper %1 conf/vlsi/PaulBS15 %A Paul, Sudipta %A Banerjee, Pritha %A Sur-Kolay, Susmita %B VLSI-SoC %D 2015 %I IEEE %K dblp %P 7-12 %T Flare reduction in EUV Lithography by perturbation of wire segments. %U http://dblp.uni-trier.de/db/conf/vlsi/vlsisoc2015.html#PaulBS15 %@ 978-1-4673-9140-5

@inproceedings{conf/vlsi/PaulBS15, added-at = {2023-09-02T00:00:00.000+0200}, author = {Paul, Sudipta and Banerjee, Pritha and Sur-Kolay, Susmita}, biburl = {https://www.bibsonomy.org/bibtex/2403593214f635c3ee2d8ececb9ca6206/dblp}, booktitle = {VLSI-SoC}, crossref = {conf/vlsi/2015soc}, ee = {https://doi.org/10.1109/VLSI-SoC.2015.7314383}, interhash = {c6375064fb2af7ce27a33a71bbdf720e}, intrahash = {403593214f635c3ee2d8ececb9ca6206}, isbn = {978-1-4673-9140-5}, keywords = {dblp}, pages = {7-12}, publisher = {IEEE}, timestamp = {2024-04-10T12:20:45.000+0200}, title = {Flare reduction in EUV Lithography by perturbation of wire segments.}, url = {http://dblp.uni-trier.de/db/conf/vlsi/vlsisoc2015.html#PaulBS15}, year = 2015 }