%0 Journal Article %1 journals/mr/TaoWLWRC13 %A Tao, Jun-Yong %A Wang, Xiao-Jing %A Liu, Bin %A Wang, Yan-Lei %A Ren, Zhi-Qian %A Chen, Xun %D 2013 %J Microelectron. Reliab. %K dblp %N 9-11 %P 1667-1671 %T Improved bending fatigue life of single crystal silicon micro-beam by phosphorus doping. %U http://dblp.uni-trier.de/db/journals/mr/mr53.html#TaoWLWRC13 %V 53

@article{journals/mr/TaoWLWRC13, added-at = {2020-02-22T00:00:00.000+0100}, author = {Tao, Jun-Yong and Wang, Xiao-Jing and Liu, Bin and Wang, Yan-Lei and Ren, Zhi-Qian and Chen, Xun}, biburl = {https://www.bibsonomy.org/bibtex/22d21698376d11608c442d30aa2bf18ba/dblp}, ee = {https://doi.org/10.1016/j.microrel.2013.07.074}, interhash = {ca6d9998dd0490933f103a73527298ec}, intrahash = {2d21698376d11608c442d30aa2bf18ba}, journal = {Microelectron. Reliab.}, keywords = {dblp}, number = {9-11}, pages = {1667-1671}, timestamp = {2020-02-25T13:28:18.000+0100}, title = {Improved bending fatigue life of single crystal silicon micro-beam by phosphorus doping.}, url = {http://dblp.uni-trier.de/db/journals/mr/mr53.html#TaoWLWRC13}, volume = 53, year = 2013 }