%0 Journal Article %1 journals/ieicet/YasuiOKNTA09 %A Yasui, Kanji %A Ooshima, Yutaka %A Kuroki, Yuichiro %A Nishiyama, Hiroshi %A Takata, Masasuke %A Akahane, Tadashi %D 2009 %J IEICE Trans. Electron. %K dblp %N 12 %P 1438-1442 %T Hydrogen Plasma Annealing of ZnO Films Deposited by Magnetron Sputtering with Third Electrode. %U http://dblp.uni-trier.de/db/journals/ieicet/ieicet92c.html#YasuiOKNTA09 %V 92-C

@article{journals/ieicet/YasuiOKNTA09, added-at = {2020-04-11T00:00:00.000+0200}, author = {Yasui, Kanji and Ooshima, Yutaka and Kuroki, Yuichiro and Nishiyama, Hiroshi and Takata, Masasuke and Akahane, Tadashi}, biburl = {https://www.bibsonomy.org/bibtex/2d4cf9753f671f67494ea39919c9a8693/dblp}, ee = {http://search.ieice.org/bin/summary.php?id=e92-c_12_1438}, interhash = {ca9fdd1a1ea0fd518edef9a7bf066fd2}, intrahash = {d4cf9753f671f67494ea39919c9a8693}, journal = {IEICE Trans. Electron.}, keywords = {dblp}, number = 12, pages = {1438-1442}, timestamp = {2020-04-14T11:54:38.000+0200}, title = {Hydrogen Plasma Annealing of ZnO Films Deposited by Magnetron Sputtering with Third Electrode.}, url = {http://dblp.uni-trier.de/db/journals/ieicet/ieicet92c.html#YasuiOKNTA09}, volume = {92-C}, year = 2009 }