%0 Conference Paper %1 conf/case/SustoJOM13 %A Susto, Gian Antonio %A Johnston, Adrian B. %A O'Hara, Paul G. %A McLoone, Seán F. %B CASE %D 2013 %I IEEE %K dblp %P 201-206 %T Virtual metrology enabled early stage prediction for enhanced control of multi-stage fabrication processes. %U http://dblp.uni-trier.de/db/conf/case/case2013.html#SustoJOM13

@inproceedings{conf/case/SustoJOM13, added-at = {2019-06-02T00:00:00.000+0200}, author = {Susto, Gian Antonio and Johnston, Adrian B. and O'Hara, Paul G. and McLoone, Seán F.}, biburl = {https://www.bibsonomy.org/bibtex/29d90234221438a00730f15ff8c48e0be/dblp}, booktitle = {CASE}, crossref = {conf/case/2013}, ee = {https://www.wikidata.org/entity/Q59297398}, interhash = {ce80c0c61f8a1de4d563d4c20557c17a}, intrahash = {9d90234221438a00730f15ff8c48e0be}, keywords = {dblp}, pages = {201-206}, publisher = {IEEE}, timestamp = {2019-10-17T21:19:18.000+0200}, title = {Virtual metrology enabled early stage prediction for enhanced control of multi-stage fabrication processes.}, url = {http://dblp.uni-trier.de/db/conf/case/case2013.html#SustoJOM13}, year = 2013 }