%0 Conference Paper %1 conf/iccci/ChenLLTCL10 %A Chen, Lih-Shyang %A Lay, Young-Jinn %A Lin, Lian-Yong %A Tang, Jing-Jou %A Cheng, Wen-Lin %A Lin, Yu-Jen %B ICCCI (1) %D 2010 %E Pan, Jeng-Shyang %E Chen, Shyi-Ming %E Nguyen, Ngoc Thanh %I Springer %K dblp %P 117-127 %T The 3D Display and Analysis of the Pattern of Photolithography. %U http://dblp.uni-trier.de/db/conf/iccci/iccci2010-1.html#ChenLLTCL10 %V 6421 %@ 978-3-642-16692-1

@inproceedings{conf/iccci/ChenLLTCL10, added-at = {2017-05-22T00:00:00.000+0200}, author = {Chen, Lih-Shyang and Lay, Young-Jinn and Lin, Lian-Yong and Tang, Jing-Jou and Cheng, Wen-Lin and Lin, Yu-Jen}, biburl = {https://www.bibsonomy.org/bibtex/2ab7c7a3ca05495a08847960f78df1a9f/dblp}, booktitle = {ICCCI (1)}, crossref = {conf/iccci/2010-1}, editor = {Pan, Jeng-Shyang and Chen, Shyi-Ming and Nguyen, Ngoc Thanh}, ee = {https://doi.org/10.1007/978-3-642-16693-8_13}, interhash = {cf7eea2d5ff7a4b887fe9df405b18de6}, intrahash = {ab7c7a3ca05495a08847960f78df1a9f}, isbn = {978-3-642-16692-1}, keywords = {dblp}, pages = {117-127}, publisher = {Springer}, series = {Lecture Notes in Computer Science}, timestamp = {2024-04-10T00:03:32.000+0200}, title = {The 3D Display and Analysis of the Pattern of Photolithography.}, url = {http://dblp.uni-trier.de/db/conf/iccci/iccci2010-1.html#ChenLLTCL10}, volume = 6421, year = 2010 }