Inproceedings,
ALD Ta2O5 and Hf-doped Ta2O5 for BEOL compatible MIM.
D. Triyoso, W. Weinreich, K. Seidel, M. Nolan, P. Polakowski, D. Utess, S. Ohsiek, K. Dittmar, M. Weisheit, M. Licbau, and R. Fox.ICICDT, page 1-4. IEEE, (2014)
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- conf/icicdt/TriyosoWSNPUODW14
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- inproceedings
- booktitle
- ICICDT
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- 2014
- pages
- 1-4
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- IEEE
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- conf/icicdt/2014
- ee
- https://doi.org/10.1109/ICICDT.2014.6838595
- isbn
- 978-1-4799-2153-9
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- http://dblp.uni-trier.de/db/conf/icicdt/icicdt2014.html#TriyosoWSNPUODW14
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%1 conf/icicdt/TriyosoWSNPUODW14
%A Triyoso, D. H.
%A Weinreich, Wenke
%A Seidel, Konrad
%A Nolan, Mark G.
%A Polakowski, Patrick
%A Utess, D.
%A Ohsiek, Susanne
%A Dittmar, K.
%A Weisheit, M.
%A Licbau, M.
%A Fox, R.
%B ICICDT
%D 2014
%I IEEE
%K dblp
%P 1-4
%T ALD Ta2O5 and Hf-doped Ta2O5 for BEOL compatible MIM.
%U http://dblp.uni-trier.de/db/conf/icicdt/icicdt2014.html#TriyosoWSNPUODW14
%@ 978-1-4799-2153-9
@inproceedings{conf/icicdt/TriyosoWSNPUODW14,
added-at = {2023-09-30T00:00:00.000+0200},
author = {Triyoso, D. H. and Weinreich, Wenke and Seidel, Konrad and Nolan, Mark G. and Polakowski, Patrick and Utess, D. and Ohsiek, Susanne and Dittmar, K. and Weisheit, M. and Licbau, M. and Fox, R.},
biburl = {https://www.bibsonomy.org/bibtex/220929bb239bfcd5879c03702c709788f/dblp},
booktitle = {ICICDT},
crossref = {conf/icicdt/2014},
ee = {https://doi.org/10.1109/ICICDT.2014.6838595},
interhash = {d17546ab04ad4e125564ef44e24fd118},
intrahash = {20929bb239bfcd5879c03702c709788f},
isbn = {978-1-4799-2153-9},
keywords = {dblp},
pages = {1-4},
publisher = {IEEE},
timestamp = {2024-04-10T21:06:03.000+0200},
title = {ALD Ta2O5 and Hf-doped Ta2O5 for BEOL compatible MIM.},
url = {http://dblp.uni-trier.de/db/conf/icicdt/icicdt2014.html#TriyosoWSNPUODW14},
year = 2014
}