%0 Thesis %1 info3-diplom1999-115 %A Bohr, Markus %D 1999 %K i3thesis %T Scheduling Verfahren für Clustertools in der Halbleiterfertigung

@mastersthesis{info3-diplom1999-115, added-at = {2016-03-10T17:41:27.000+0100}, author = {Bohr, Markus}, biburl = {https://www.bibsonomy.org/bibtex/240b4e3d299b0bfb366c5bdaf0ca6b1fc/uniwue_info3}, interhash = {1dbdc9968253ca4e3b25a93257dc106a}, intrahash = {40b4e3d299b0bfb366c5bdaf0ca6b1fc}, keywords = {i3thesis}, month = {8}, school = {University of Wuerzburg}, timestamp = {2022-03-14T00:12:19.000+0100}, title = {Scheduling Verfahren für Clustertools in der Halbleiterfertigung}, year = 1999 }