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%0 Journal Article
%1 journals/sensors/ZhangYHYYHSN19
%A Zhang, Meng
%A Yang, Jian
%A He, Yurong
%A Yang, Fan
%A Yang, Fuhua
%A Han, Guowei
%A Si, Chaowei
%A Ning, Jin
%D 2019
%J Sensors
%K dblp
%N 1
%P 93
%T Research on a 3D Encapsulation Technique for Capacitive MEMS Sensors Based on Through Silicon Via.
%U http://dblp.uni-trier.de/db/journals/sensors/sensors19.html#ZhangYHYYHSN19
%V 19
@article{journals/sensors/ZhangYHYYHSN19,
added-at = {2019-10-19T00:00:00.000+0200},
author = {Zhang, Meng and Yang, Jian and He, Yurong and Yang, Fan and Yang, Fuhua and Han, Guowei and Si, Chaowei and Ning, Jin},
biburl = {https://www.bibsonomy.org/bibtex/26b7edcfdbfe9528a3f4aa61225412c82/dblp},
ee = {https://www.wikidata.org/entity/Q61454401},
interhash = {ddbdaf275f195c1d057e4e0bb904fedd},
intrahash = {6b7edcfdbfe9528a3f4aa61225412c82},
journal = {Sensors},
keywords = {dblp},
number = 1,
pages = 93,
timestamp = {2019-10-22T13:02:55.000+0200},
title = {Research on a 3D Encapsulation Technique for Capacitive MEMS Sensors Based on Through Silicon Via.},
url = {http://dblp.uni-trier.de/db/journals/sensors/sensors19.html#ZhangYHYYHSN19},
volume = 19,
year = 2019
}