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%0 Journal Article
%1 journals/micromachines/LuZJHZS16
%A Lu, Han
%A Zhang, Hua
%A Jin, Mingliang
%A He, Tao
%A Zhou, Guofu
%A Shui, Lingling
%D 2016
%J Micromachines
%K dblp
%N 2
%P 19
%T Two-Layer Microstructures Fabricated by One-Step Anisotropic Wet Etching of Si in KOH Solution.
%U http://dblp.uni-trier.de/db/journals/micromachines/micromachines7.html#LuZJHZS16
%V 7
@article{journals/micromachines/LuZJHZS16,
added-at = {2019-07-29T00:00:00.000+0200},
author = {Lu, Han and Zhang, Hua and Jin, Mingliang and He, Tao and Zhou, Guofu and Shui, Lingling},
biburl = {https://www.bibsonomy.org/bibtex/22199564cabd92656594557757d6517a6/dblp},
ee = {https://www.wikidata.org/entity/Q64932465},
interhash = {ddc2dddfdeaa5e1e3d52fb326d34d25d},
intrahash = {2199564cabd92656594557757d6517a6},
journal = {Micromachines},
keywords = {dblp},
number = 2,
pages = 19,
timestamp = {2019-07-30T11:43:31.000+0200},
title = {Two-Layer Microstructures Fabricated by One-Step Anisotropic Wet Etching of Si in KOH Solution.},
url = {http://dblp.uni-trier.de/db/journals/micromachines/micromachines7.html#LuZJHZS16},
volume = 7,
year = 2016
}
