%0 Conference Paper %1 conf/nems/XieYC09 %A Xie, Jianbing %A Yuan, Weizheng %A Chang, Honglong %B NEMS %D 2009 %I IEEE Computer Society %K dblp %P 253-256 %T A novel method for the manufacture of MEMS devices with large exposed area based on SOI wafers. %U http://dblp.uni-trier.de/db/conf/nems/nems2009.html#XieYC09 %@ 978-1-4244-4629-2

@inproceedings{conf/nems/XieYC09, added-at = {2023-03-23T00:00:00.000+0100}, author = {Xie, Jianbing and Yuan, Weizheng and Chang, Honglong}, biburl = {https://www.bibsonomy.org/bibtex/21ba3d6dc59ccdaebc6a2c77b8ec7c357/dblp}, booktitle = {NEMS}, crossref = {conf/nems/2009}, ee = {https://doi.ieeecomputersociety.org/10.1109/NEMS.2009.5068571}, interhash = {df1dc86564cb36ebf848c78886310547}, intrahash = {1ba3d6dc59ccdaebc6a2c77b8ec7c357}, isbn = {978-1-4244-4629-2}, keywords = {dblp}, pages = {253-256}, publisher = {IEEE Computer Society}, timestamp = {2024-04-10T19:56:10.000+0200}, title = {A novel method for the manufacture of MEMS devices with large exposed area based on SOI wafers.}, url = {http://dblp.uni-trier.de/db/conf/nems/nems2009.html#XieYC09}, year = 2009 }