%0 Journal Article %1 journals/sensors/GhisiM19 %A Ghisi, Aldo %A Mariani, Stefano %D 2019 %J Sensors %K dblp %N 15 %P 3256 %T Effect of Imperfections Due to Material Heterogeneity on the Offset of Polysilicon MEMS Structures. %U http://dblp.uni-trier.de/db/journals/sensors/sensors19.html#GhisiM19 %V 19

@article{journals/sensors/GhisiM19, added-at = {2020-05-30T00:00:00.000+0200}, author = {Ghisi, Aldo and Mariani, Stefano}, biburl = {https://www.bibsonomy.org/bibtex/2e9353e214584730b735c105cd6673f3b/dblp}, ee = {https://www.wikidata.org/entity/Q92178160}, interhash = {e1933d7056e16f30013ebb5dd96dfb27}, intrahash = {e9353e214584730b735c105cd6673f3b}, journal = {Sensors}, keywords = {dblp}, number = 15, pages = 3256, timestamp = {2020-06-02T12:17:17.000+0200}, title = {Effect of Imperfections Due to Material Heterogeneity on the Offset of Polysilicon MEMS Structures.}, url = {http://dblp.uni-trier.de/db/journals/sensors/sensors19.html#GhisiM19}, volume = 19, year = 2019 }