%0 Conference Paper %1 conf/ofc/JeongSSHTM14 %A Jeong, Seok-Hwan %A Shimura, Daisuke %A Simoyama, Takasi %A Horikawa, Tsuyoshi %A Tanaka, Yu %A Morito, Ken %B OFC %D 2014 %I IEEE %K dblp %P 1-3 %T Delayed interferometer based Si-wire WDM demultiplexers fabricated by phase controllable and productive 300-mm wafer-scale ArF-immersion lithography technology. %U http://dblp.uni-trier.de/db/conf/ofc/ofc2014.html#JeongSSHTM14

@inproceedings{conf/ofc/JeongSSHTM14, added-at = {2021-07-09T00:00:00.000+0200}, author = {Jeong, Seok-Hwan and Shimura, Daisuke and Simoyama, Takasi and Horikawa, Tsuyoshi and Tanaka, Yu and Morito, Ken}, biburl = {https://www.bibsonomy.org/bibtex/2a6a61e0e5f913acd8f03af12a9b8d9a5/dblp}, booktitle = {OFC}, crossref = {conf/ofc/2014}, ee = {https://doi.org/10.1364/OFC.2014.Th3F.5}, interhash = {e1ecec5fffd3010d9156ef60b2820fda}, intrahash = {a6a61e0e5f913acd8f03af12a9b8d9a5}, keywords = {dblp}, pages = {1-3}, publisher = {IEEE}, timestamp = {2024-04-09T21:50:54.000+0200}, title = {Delayed interferometer based Si-wire WDM demultiplexers fabricated by phase controllable and productive 300-mm wafer-scale ArF-immersion lithography technology.}, url = {http://dblp.uni-trier.de/db/conf/ofc/ofc2014.html#JeongSSHTM14}, year = 2014 }