%0 Conference Paper %1 conf/iros/TangHSTHHLY20 %A Tang, Tao %A Hao, Yansheng %A Shen, Yigang %A Tanaka, Yo %A Huang, Ming %A Hosokawa, Yoichiroh %A Li, Ming %A Yalikun, Yaxiaer %B IROS %D 2020 %I IEEE %K dblp %P 2780-2785 %T On-chip integration of ultra-thin glass cantilever for physical property measurement activated by femtosecond laser impulse. %U http://dblp.uni-trier.de/db/conf/iros/iros2020.html#TangHSTHHLY20 %@ 978-1-7281-6212-6

@inproceedings{conf/iros/TangHSTHHLY20, added-at = {2023-06-26T00:00:00.000+0200}, author = {Tang, Tao and Hao, Yansheng and Shen, Yigang and Tanaka, Yo and Huang, Ming and Hosokawa, Yoichiroh and Li, Ming and Yalikun, Yaxiaer}, biburl = {https://www.bibsonomy.org/bibtex/256873ae907363568bc6e713e3db0f35c/dblp}, booktitle = {IROS}, crossref = {conf/iros/2020}, ee = {https://doi.org/10.1109/IROS45743.2020.9341336}, interhash = {e58cc31e92034c72023c486511bfca3a}, intrahash = {56873ae907363568bc6e713e3db0f35c}, isbn = {978-1-7281-6212-6}, keywords = {dblp}, pages = {2780-2785}, publisher = {IEEE}, timestamp = {2024-04-09T12:06:16.000+0200}, title = {On-chip integration of ultra-thin glass cantilever for physical property measurement activated by femtosecond laser impulse.}, url = {http://dblp.uni-trier.de/db/conf/iros/iros2020.html#TangHSTHHLY20}, year = 2020 }