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%0 Conference Paper
%1 conf/iros/TangHSTHHLY20
%A Tang, Tao
%A Hao, Yansheng
%A Shen, Yigang
%A Tanaka, Yo
%A Huang, Ming
%A Hosokawa, Yoichiroh
%A Li, Ming
%A Yalikun, Yaxiaer
%B IROS
%D 2020
%I IEEE
%K dblp
%P 2780-2785
%T On-chip integration of ultra-thin glass cantilever for physical property measurement activated by femtosecond laser impulse.
%U http://dblp.uni-trier.de/db/conf/iros/iros2020.html#TangHSTHHLY20
%@ 978-1-7281-6212-6
@inproceedings{conf/iros/TangHSTHHLY20,
added-at = {2023-06-26T00:00:00.000+0200},
author = {Tang, Tao and Hao, Yansheng and Shen, Yigang and Tanaka, Yo and Huang, Ming and Hosokawa, Yoichiroh and Li, Ming and Yalikun, Yaxiaer},
biburl = {https://www.bibsonomy.org/bibtex/256873ae907363568bc6e713e3db0f35c/dblp},
booktitle = {IROS},
crossref = {conf/iros/2020},
ee = {https://doi.org/10.1109/IROS45743.2020.9341336},
interhash = {e58cc31e92034c72023c486511bfca3a},
intrahash = {56873ae907363568bc6e713e3db0f35c},
isbn = {978-1-7281-6212-6},
keywords = {dblp},
pages = {2780-2785},
publisher = {IEEE},
timestamp = {2024-04-09T12:06:16.000+0200},
title = {On-chip integration of ultra-thin glass cantilever for physical property measurement activated by femtosecond laser impulse.},
url = {http://dblp.uni-trier.de/db/conf/iros/iros2020.html#TangHSTHHLY20},
year = 2020
}