%0 Conference Paper %1 conf/nems/SongCZ19 %A Song, Ziyang %A Cui, Jian %A Zhao, Qiancheng %B NEMS %D 2019 %I IEEE %K dblp %P 477-481 %T A Silicon Resonant Accelerometer with Vibrating Beam Integrated with Comb Fingers Sensing Structure. %U http://dblp.uni-trier.de/db/conf/nems/nems2019.html#SongCZ19 %@ 978-1-7281-1629-7

@inproceedings{conf/nems/SongCZ19, added-at = {2019-12-09T00:00:00.000+0100}, author = {Song, Ziyang and Cui, Jian and Zhao, Qiancheng}, biburl = {https://www.bibsonomy.org/bibtex/2a1fcda3174b49af968449a8bad484961/dblp}, booktitle = {NEMS}, crossref = {conf/nems/2019}, ee = {https://doi.org/10.1109/NEMS.2019.8915674}, interhash = {ecab8d0b2c7902707b1f9333d281c6c5}, intrahash = {a1fcda3174b49af968449a8bad484961}, isbn = {978-1-7281-1629-7}, keywords = {dblp}, pages = {477-481}, publisher = {IEEE}, timestamp = {2019-12-10T11:39:14.000+0100}, title = {A Silicon Resonant Accelerometer with Vibrating Beam Integrated with Comb Fingers Sensing Structure.}, url = {http://dblp.uni-trier.de/db/conf/nems/nems2019.html#SongCZ19}, year = 2019 }