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%0 Journal Article
%1 journals/mr/LembergerPZBFR05
%A Lemberger, Martin
%A Paskaleva, Albena
%A Zürcher, Stefan
%A Bauer, Anton J.
%A Frey, Lothar
%A Ryssel, Heiner
%D 2005
%J Microelectron. Reliab.
%K dblp
%N 5-6
%P 819-822
%T Electrical properties of hafnium silicate films obtained from a single-source MOCVD precursor.
%U http://dblp.uni-trier.de/db/journals/mr/mr45.html#LembergerPZBFR05
%V 45
@article{journals/mr/LembergerPZBFR05,
added-at = {2024-10-06T00:00:00.000+0200},
author = {Lemberger, Martin and Paskaleva, Albena and Zürcher, Stefan and Bauer, Anton J. and Frey, Lothar and Ryssel, Heiner},
biburl = {https://www.bibsonomy.org/bibtex/2550e03ce5294a8671deb82cf50efc31a/dblp},
ee = {https://doi.org/10.1016/j.microrel.2004.11.040},
interhash = {f1af2a47922b5cb0b5b810c4fe76810f},
intrahash = {550e03ce5294a8671deb82cf50efc31a},
journal = {Microelectron. Reliab.},
keywords = {dblp},
number = {5-6},
pages = {819-822},
timestamp = {2024-10-07T07:57:43.000+0200},
title = {Electrical properties of hafnium silicate films obtained from a single-source MOCVD precursor.},
url = {http://dblp.uni-trier.de/db/journals/mr/mr45.html#LembergerPZBFR05},
volume = 45,
year = 2005
}