%0 Conference Paper %1 conf/essderc/WadaSZT12 %A Wada, Akira %A Samukawa, Seiji %A Zhang, Rui %A Takagi, Shinichi %B ESSDERC %D 2012 %I IEEE %K dblp %P 85-88 %T Thin germanium dioxide film with a high quality interface formed in a direct neutral beam oxidation process. %U http://dblp.uni-trier.de/db/conf/essderc/essderc2012.html#WadaSZT12 %@ 978-1-4673-1707-8

@inproceedings{conf/essderc/WadaSZT12, added-at = {2019-10-19T00:00:00.000+0200}, author = {Wada, Akira and Samukawa, Seiji and Zhang, Rui and Takagi, Shinichi}, biburl = {https://www.bibsonomy.org/bibtex/2180f70c79e06fa5d60ac2273d9924c2b/dblp}, booktitle = {ESSDERC}, crossref = {conf/essderc/2012}, ee = {https://doi.org/10.1109/ESSDERC.2012.6343339}, interhash = {f590e18f01f4502d0a9881a434e488a8}, intrahash = {180f70c79e06fa5d60ac2273d9924c2b}, isbn = {978-1-4673-1707-8}, keywords = {dblp}, pages = {85-88}, publisher = {IEEE}, timestamp = {2019-10-22T15:46:01.000+0200}, title = {Thin germanium dioxide film with a high quality interface formed in a direct neutral beam oxidation process.}, url = {http://dblp.uni-trier.de/db/conf/essderc/essderc2012.html#WadaSZT12}, year = 2012 }