%0 Conference Paper %1 conf/ieeesensors/SakakiharaWTST19 %A Sakakihara, Yuki %A Watatani, Kazuki %A Terao, Kyohei %A Shimokawa, Fusao %A Takao, Hidekuni %B IEEE SENSORS %D 2019 %I IEEE %K dblp %P 1-4 %T Parylene-C Coating on High Resolution MEMS Tactile Sensor for Protection of Measurement Surface. %U http://dblp.uni-trier.de/db/conf/ieeesensors/ieeesensors2019.html#SakakiharaWTST19 %@ 978-1-7281-1634-1

@inproceedings{conf/ieeesensors/SakakiharaWTST19, added-at = {2023-09-30T00:00:00.000+0200}, author = {Sakakihara, Yuki and Watatani, Kazuki and Terao, Kyohei and Shimokawa, Fusao and Takao, Hidekuni}, biburl = {https://www.bibsonomy.org/bibtex/24cf63061a89666f53da473bbe5179fa1/dblp}, booktitle = {IEEE SENSORS}, crossref = {conf/ieeesensors/2019}, ee = {https://doi.org/10.1109/SENSORS43011.2019.8956814}, interhash = {f5fd955bffa6a8f10bc37adf33bf5324}, intrahash = {4cf63061a89666f53da473bbe5179fa1}, isbn = {978-1-7281-1634-1}, keywords = {dblp}, pages = {1-4}, publisher = {IEEE}, timestamp = {2024-04-09T12:37:34.000+0200}, title = {Parylene-C Coating on High Resolution MEMS Tactile Sensor for Protection of Measurement Surface.}, url = {http://dblp.uni-trier.de/db/conf/ieeesensors/ieeesensors2019.html#SakakiharaWTST19}, year = 2019 }