%0 Conference Paper %1 conf/nems/MeierBWK12 %A Meier, Robert Ch. %A Badilita, Vlad %A Wallrabe, Ulrike %A Korvink, Jan G. %B NEMS %D 2012 %I IEEE %K dblp %P 308-311 %T Processing of 3D multilevel SU-8 fluidic network assisted by PerMX dry-photoresist lamination. %U http://dblp.uni-trier.de/db/conf/nems/nems2012.html#MeierBWK12 %@ 978-1-4673-1122-9

@inproceedings{conf/nems/MeierBWK12, added-at = {2019-10-19T00:00:00.000+0200}, author = {Meier, Robert Ch. and Badilita, Vlad and Wallrabe, Ulrike and Korvink, Jan G.}, biburl = {https://www.bibsonomy.org/bibtex/21a7785dda0497750e0acb043e1e16a62/dblp}, booktitle = {NEMS}, crossref = {conf/nems/2012}, ee = {https://doi.org/10.1109/NEMS.2012.6196781}, interhash = {f7b43c9696c928a41e97ad6b6eedc74b}, intrahash = {1a7785dda0497750e0acb043e1e16a62}, isbn = {978-1-4673-1122-9}, keywords = {dblp}, pages = {308-311}, publisher = {IEEE}, timestamp = {2019-10-22T15:39:42.000+0200}, title = {Processing of 3D multilevel SU-8 fluidic network assisted by PerMX dry-photoresist lamination.}, url = {http://dblp.uni-trier.de/db/conf/nems/nems2012.html#MeierBWK12}, year = 2012 }