%0 Thesis %1 phd/us/Wu05a %A Wu, Yan %D 2005 %K dblp %T Effect of Space Charges on Micro-to Nanoscale Electrostatic Actuation

@phdthesis{phd/us/Wu05a, added-at = {2024-08-22T00:00:00.000+0200}, author = {Wu, Yan}, biburl = {https://www.bibsonomy.org/bibtex/2497fc0c85f6dca356e01d68e14a48ae2/dblp}, ee = {https://hdl.handle.net/2142/80911}, interhash = {f82c57747c240454fae47807d0071209}, intrahash = {497fc0c85f6dca356e01d68e14a48ae2}, keywords = {dblp}, school = {University of Illinois Urbana-Champaign, USA}, timestamp = {2024-08-26T07:18:40.000+0200}, title = {Effect of Space Charges on Micro-to Nanoscale Electrostatic Actuation}, year = 2005 }