%0 Conference Paper %1 conf/nems/GauHH09 %A Gau, Wei-Hsin %A Huang, Shin-Chun %A Hu, Yuh-Chung %B NEMS %D 2009 %I IEEE Computer Society %K dblp %P 211-214 %T Fabrication and vibration analysis of micro-cross beams. %U http://dblp.uni-trier.de/db/conf/nems/nems2009.html#GauHH09 %@ 978-1-4244-4629-2

@inproceedings{conf/nems/GauHH09, added-at = {2023-03-23T00:00:00.000+0100}, author = {Gau, Wei-Hsin and Huang, Shin-Chun and Hu, Yuh-Chung}, biburl = {https://www.bibsonomy.org/bibtex/27cfccc1a95ac2eadcc6b0706c2a846df/dblp}, booktitle = {NEMS}, crossref = {conf/nems/2009}, ee = {https://doi.ieeecomputersociety.org/10.1109/NEMS.2009.5068561}, interhash = {f8c3e472ba6951c68760879b8062ec4c}, intrahash = {7cfccc1a95ac2eadcc6b0706c2a846df}, isbn = {978-1-4244-4629-2}, keywords = {dblp}, pages = {211-214}, publisher = {IEEE Computer Society}, timestamp = {2024-04-10T19:56:10.000+0200}, title = {Fabrication and vibration analysis of micro-cross beams.}, url = {http://dblp.uni-trier.de/db/conf/nems/nems2009.html#GauHH09}, year = 2009 }