%0 Conference Paper %1 conf/iecon/ChenLLCD23 %A Chen, Zhen-Yin Annie %A Lin, Chun-Cheng %A Lu, Ke-Wen %A Chin, Hui-Hsin %A Deng, Der-Jiunn %B IECON %D 2023 %I IEEE %K dblp %P 1-2 %T An Improved Meta Learning Approach for Optimizing Recipe Parameters for Semiconductor Processes. %U http://dblp.uni-trier.de/db/conf/iecon/iecon2023.html#ChenLLCD23 %@ 979-8-3503-3182-0

@inproceedings{conf/iecon/ChenLLCD23, added-at = {2023-11-25T00:00:00.000+0100}, author = {Chen, Zhen-Yin Annie and Lin, Chun-Cheng and Lu, Ke-Wen and Chin, Hui-Hsin and Deng, Der-Jiunn}, biburl = {https://www.bibsonomy.org/bibtex/22602e283e2840e844be7cf3e1bae2c55/dblp}, booktitle = {IECON}, crossref = {conf/iecon/2023}, ee = {https://doi.org/10.1109/IECON51785.2023.10312119}, interhash = {fc9ab8fd93d68bee6ddff9741c7b95ca}, intrahash = {2602e283e2840e844be7cf3e1bae2c55}, isbn = {979-8-3503-3182-0}, keywords = {dblp}, pages = {1-2}, publisher = {IEEE}, timestamp = {2024-04-09T17:55:37.000+0200}, title = {An Improved Meta Learning Approach for Optimizing Recipe Parameters for Semiconductor Processes.}, url = {http://dblp.uni-trier.de/db/conf/iecon/iecon2023.html#ChenLLCD23}, year = 2023 }