%0 Thesis %1 kolb2014electron %A Kolb, Tristan %D 2014 %K dnb Öffentliche_Darbietungen Film Rundfunk %T Electron beam lithography of molecular glass resist films prepared by physical vapor deposition

@phdthesis{kolb2014electron, added-at = {2016-05-30T20:54:40.000+0200}, author = {Kolb, Tristan}, biburl = {https://www.bibsonomy.org/bibtex/206ae050a9b832822871cb1b6f60800d8/genealogie}, dnbtitleid = {1070580961}, interhash = {b29f07343e60575a2e21f034bcd13798}, intrahash = {06ae050a9b832822871cb1b6f60800d8}, keywords = {dnb Öffentliche_Darbietungen Film Rundfunk}, school = {Uni Bayreuth}, timestamp = {2016-05-30T20:54:40.000+0200}, title = {Electron beam lithography of molecular glass resist films prepared by physical vapor deposition}, year = 2014 }